Park Systems GmbH
About us
Accurion was founded in 1991 under the name "Nanofilm Technologie GmbH" as a spin-off of the Max Planck Institute for Biophysical Chemistry in Göttingen. The company started with a novel microscope for the investigation of ultrathin films, the Brewsterwinkel - microscope.
In 1992, active vibration isolation systems were added to the product range, as the microscopes were extremely sensitive to vibrations due to their high resolution.
Accurion has always offered solutions for demanding metrology tasks in the fields of surface analysis and active vibration isolation.
A team of 32 employees develops, produces and distributes the products. With subsidiaries in the USA, India and China and more than 20 distributors, customers are offered a worldwide sales and service structure.
At the end of 2022, the Korean company Park Systems Corp. (KOSDAQ: 140860) acquired Accurion GmbH.
Products and Services
Thin Film Characterization
Imaging Ellipsometry enables the measurement of refractive indices and thicknesses of structures sized down to 1µm. All pixels are measured in parallel. Direct ellipsometric contrast images provide a fast detection of defects and contaminations.
Application fields are 2D materials, MEMS, graphene, biochips, semiconductor materials, solar cells, flat panels, Langmuir-Blodgett films, polymers, etc.
Within the field of quality control our referenced spectroscopic ellipsometer (RSE) combines high speed (100 spectra per second) with the accuracy of an ellipsometric measurement.
Active Vibration Isolation
Active vibration isolation is the most effective solution to isolate sensitive equipment from disturbing vibrations and key to precise and repeatable results. The working principle is the active compensation of vibrations by generating a counterforce.
Application examples can be found within hardness testing, scanning probe microscopy, scanning electron microscopy, micromanipulation, nanoindentation and profilometry.
