Accurion GmbH

About us

Accurion was founded in 1991 as „Nanofilm Technologie GmbH“. It was originally a spin-off from the Max Planck Institute for biophysical chemistry in Goettingen. The company started out with designing the Brewster angle microscope for the characterization of ultrathin films.

As these microscopes turned out to be quite sensitive to vibrations the division of active vibration isolation followed in 1996.

Ever since Accurion supplies advanced instrumentation for challenging measurement tasks with its two divisions thin film characterization and active vibration isolation.

34 employees help to develop, manufacture and distribute these products. Branch offices in the US, India and China and over 20 resellers provide a global sales and service structure.

Products and Services

Thin Film Characterization

Imaging Ellipsometry enables the measurement of refractive indices and thicknesses of structures sized down to 1µm. All pixels are measured in parallel. Direct ellipsometric contrast images provide a fast detection of defects and contaminations.

Application fields are 2D materials, MEMS, graphene, biochips, semiconductor materials, solar cells, flat panels, Langmuir-Blodgett films, polymers, etc.

Within the field of quality control our referenced spectroscopic ellipsometer (RSE) combines high speed (100 spectra per second) with the accuracy of an ellipsometric measurement.

Active Vibration Isolation

Active vibration isolation is the most effective solution to isolate sensitive equipment from disturbing vibrations and key to precise and repeatable results. The working principle is the active compensation of vibrations by generating a counterforce.

Application examples can be found within hardness testing, scanning probe microscopy, scanning electron microscopy, micromanipulation, nanoindentation and profilometry.



Accurion GmbH
Mr Stephan Ferneding
Stresemannstr. 30
D-37079 Göttingen

Tel.:  + 49 (0) 551 / 99960-0
Fax: +49 (0)551 / 99960-10